Thin films of TiO₂, ZnO, and TiO₂/ZnO were deposited on microscope glass slides by sol gel dip coating technique. The titanium dioxide (TiO₂) solution was obtained from titanium (IV) butoxide and butanol as the precursor, while zinc oxide (ZnO) solution was obtained from zinc acetate dehydrate and isopropanol as the precursor. Both of solution was ageing for 24 hours and different calcination temperatures used to calcined the thin films (400 °C, 500 oC, 600 oC). The thin films were characterized by X-ray Diffraction (XRD), and Atomic Force Microscopy (AFM). In this study, the effect of temperature show the difference results of single layer and bilayer thin films. The result of XRD shows when the temperature increase, the thin films provide a good crystallization phase in which the structure of the diffraction peaks higher. From the AFM analysis, the surface roughness and the grain size increases as the temperature increase. Based on the characterization was carried out, the increase in temperature has influenced the distribution on the phase structure.